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Simulation of a Surface Acoustic Wave Methane Sensor
Abstract:
Study on the working principle of the surface acoustic wave (SAW) methane sensor. Establish the physical and chemical model of sensitive mechanism based on the mass-effect and the adsorption characteristics of gas on the sensitive membrane. The linear solvation energy relationship (LSER) has been developed to describe and quantify these various interactions. Simulate the mass-sensitive gas sensor based on COMSOL multiphysics software. The simulation significantly reduces the amount of prototype experiments, sensor development cycle and development costs.
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354-357
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Online since:
August 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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