Study on Fuzzy PID Control of Amplitude Modulation Atomic Force Microscopy

He Ming Yao; Sha Ru Jiang

doi:10.4028/www.scientific.net/AMM.380-384.472

Paper Titles

Control System of Smart Home Based on Cloud Computing
p.455

Design of the Flight Control System for a Small-Scale Helicopter
p.459

Mechanical and Electrical Control System Design Based on Adaptive Control Theory
p.463

The Instantaneous Optimal Control Strategy of Parallel Hybrid Loader
p.467

Study on Fuzzy PID Control of Amplitude Modulation Atomic Force Microscopy
p.472

A Simulation of an Electrical Servo Drive Based on Optimal Control
p.476

CMAC-Based Backstepping Sliding Mode Control of PMSM
p.480

The Sliding Mode Control for Traction Control System Based on Variable Optimal Slip Ratio
p.485

RBF Neural Network in the Application of Synthetic Tower Temperature Decoupling Control Research
p.491

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 380-384Study on Fuzzy PID Control of Amplitude Modulation...

Study on Fuzzy PID Control of Amplitude Modulation Atomic Force Microscopy

Abstract:

According to the characteristics of probe motion of Amplitude Modulation Atomic Force Microscopy (AM-AFM), the model of AM-AFM probe dynamic process is obtained through Euler - Bernoulli's equation. Based on AM-AFMs negative feedback control system with a fuzzy PID control module, a complete AM-AFM system simulation platform is established. By using fuzzy system, fuzzy PID controller makes the real-time adjustment of PID parameters come true, that is, this method overcomes the difficulties of traditional PID parameter tuning and thus high-quality control effect is achieved. Moreover, this article got a set of initial value of off-line adjustment using Ziegler-Nichols method. The value is applied in the setting of fuzzy center so as to further improve the control effect. The simulation of the scanning of two typical samples is made to demonstrate the control effect of fuzzy PID. It proves the control effect of fuzzy PID and indicates that fuzzy PID can significantly improve the AM-AFM image quality of samples which have steep surface.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 380-384)

Pages:

472-475

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.380-384.472

Citation:

Cite this paper

Online since:

August 2013

Authors:

He Ming Yao, Sha Ru Jiang

Keywords:

AM-AFM, Euler-Bernoulli Model, Fuzzy PID Control, Ziegler-Nichols Method

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] G Binnig, CF Quate, C Gerber, Atomic force microscope, Physical review letters, (1986).

Google Scholar

[2] Daniel E. Rivera, Manfred Morari, Sigurd Skogestad, Internal model control: PID controller design, Industrial&Engineering Chemistry Process Design and Development, (1986).

DOI: 10.1021/i200032a041

Google Scholar

[3] U. Rabe, K. Janser, W. Arnold, Rev. Sci. Instrum. 67 (1996) 3281.

Google Scholar

[4] J Israelachvili. Intermolecular and Surface Forces[M]. San Diego, China: Academic Press, (1992).

Google Scholar

[5] B.V. Derjaguin V.M. Muller. Effect of contact deformations on the adhesion of particles. Journal of Colloid and Interface Science, Volume53, Issue2, 1975(11), Pages314-32.

DOI: 10.1016/0021-9797(75)90018-1

Google Scholar

[6] Robert W. Stark, Fourier transformed atomic force microscopy: tapping mode atomic force microscopy beyond the Hookian approximation, Surface Science, 2000: 219–228.

DOI: 10.1016/s0039-6028(00)00378-2

Google Scholar

[7] William Y Svrcek. Donald P Mahoney. Brent R Young A Real-Time Approach to Process Control, (2000).

Google Scholar

[8] Hang C C. Sin K K A Comparative Performance Study of PID Auto-Tuners, (1991).

Google Scholar