A Grating-Based Dynamic Measuring Method of Small Three-Dimensional Angles

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Abstract:

Based on the diffraction theory of the one-dimensional gratings at oblique incidence, by introducing the laser autocollimation system, a novel approach of dynamically measuring small angles with three degrees of freedom is proposed. By matrix transform, a mathematical model is established to describe the changes of small 3D angles as a function of the variation of the image position of the diffraction spot, and the solution of this model is demonstrated. A prototype machine has been made to verify the practicability of the measuring method proposed. Analysis of the measuring range and resolution of the system shows that within the range of ±1.6 degrees.

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635-639

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August 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.7498/aps.53.2118

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