A Straight Nanopore Drilling by Transmission Electron Microscope

Abstract:

For nanopore drilling in a membrane by transmission electron microscope, a straight through-pore is in general not the case of the fabrication result. For instance, a silicon nitride nanopore with an hourglass profile and a silicon oxide nanopore with a pyramid cross-section were reported in recent researches. The reason for not getting a straight through-pore by the electron drilling was analyzed. A hypothesis, which improving heat conduction property of the membrane would lead to a straight nanopore drilling, was proposed. And the hypothesis was confirmed true.

• Periodical: Applied Mechanics and Materials (Volumes 395-396)
• Pages: 179-183
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.395-396.179
• Online since: September 2013
• Authors: Tsan Chu Lin, Y.C. Wang, Zhen Wang, Shou Yang Wang, Dau Chung Wang
• Keywords: Electron-Beam Drilling, Hourglass Profile, Nanopore, Straight Through-Pore, TEM Fabrication

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[12] IMOD are Copyright (c) 1994-2011 by the Boulder Laboratory for 3-Dimensional Electron Microscopy of Cells and the Regents of the University of Colorado.