Research of Piezoelectric Cantilever Beam Diaphragm Pump

Abstract:

The design in this paper is a rectangular piezoelectric vibrator driven Cantilever Beam Diaphragm Pump. By analyzing the working principle and characteristics of the piezoelectric cantilever beam pump, we developed the dynamics model and FEA model of the piezoelectric cantilever beam and optimized through tests the main factors that affect the output flow of the piezoelectric cantilever pump. Additionally, we designed the piezoelectric cantilever pump prototype, and by using an impedance analyzer, we measured the resonance frequencies of cantilever beams of different lengths; and we used the laser micrometer to test and measure the beams of different structures under loaded and unloaded condition. The maximum displacement of the output terminal of loaded cantilever beam is 50.5μm. Furthermore, through the experiments we tested the output flow and its corresponding variation under different diameters of transmission pistons and different excitation frequencies. Experimental tests show: when selecting the cantilever beam and the drive piston with optimal performance with the input voltage at 120V, and the frequency at 197Hz, the optimum output flow rate is 89ml/min.

• Periodical: Applied Mechanics and Materials (Volumes 397-400)
• Pages: 483-488
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.397-400.483
• Online since: September 2013
• Authors: Hao Cai, Liang Liang Wang, Jing Shi Dong, Yang Yang, Feng Lin
• Keywords: Cantilever Beam, Diaphragm, Piezoelectric Pump, Rectangular Piezoelectric

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