A New TIGBT Device with Hole Bypass Emitter and Simulationuse

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Abstract:

In this paper, a new TIGBT device with Hole Bypass Emitter was proposed. Compared with traditional TIGBT, the new structure introduce a P+ hole bypass region under trench metal emitter. Simulation results by SILVACO show that the new structure suppress latch-up effectively and allow wider Safe Operation Area (SOA) as well as higher security current without latch-up and have better temperature stability. In addition, all the impurity implantations in this structure need no extra mask, it is very convenient for fabrication.

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1105-1108

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September 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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