Motion Control on Nanometer Precision Machining

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Abstract:

It is difficult to balance long travel & high precision, especially in multi-coordinate machining. In ultra-precision cutting, grinding and non-traditional machining, aimed at tri-coordinate ultra precision machining, studies the ultra precision machining technology and theory in this paper. It attempts to seek the principle in ultra precision machining as well as construct a pilot antitype with the ultra precision tri-coordinate machining system machine.

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525-527

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September 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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