Numerical Simulation Concept of a Magnetron Discharge

Abstract:

The goal at the present paper research in the theses is acquiring a new concept of simulation for the magnetron discharge. This research will be used in my PHD thesis the final goal will be to simulate the entire magnetron deposition. The experiments are made on an industrial coating machine belonging to Saint Gobain companyThis paper explains the way we cold numerical simulate the plasmatic interactions, what technics cold be used and in the end we draw our own conclusion and future research targets

• Periodical: Applied Mechanics and Materials (Volume 436)
• Pages: 238-243
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.436.238
• Online since: October 2013
• Authors: Spataru Ionut, Strajescu Eugen
• Keywords: Magnetron, Numerical Simulation, Plasma

References

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