Grating Nanomeasurement and Implementation Technology Based on TMS320F28335

Cong Yu Xu

doi:10.4028/www.scientific.net/AMM.44-47.1168

Paper Titles

Energy-Saving Design for Hydraulic Cylinder Reciprocating Seal Based on QFD
p.1146

Study on the Micro-Replication Precision of Shark Skin
p.1151

Research of Strength of Rotor System about Containing Blade Crackle Based on Nonlinear Dynamics
p.1158

Innovation and Practice of Numerical Simulation Teaching Platform of Engineering Test Courses
p.1163

Grating Nanomeasurement and Implementation Technology Based on TMS320F28335
p.1168

Research on the Sensitivity Damage Identification Method Based on Closed-Loop Feedback Control
p.1173

Numerical Investigations on the Mechanical Properties of Dry End Milling
p.1180

Numerical Simulation of Root Effect of Prestressed Anchor Cable Group
p.1185

Application of Stereographic Projection in the Search of Key Block of Surrounding Rock Mass for Underground Powerhouse
p.1189

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 44-47Grating Nanomeasurement and Implementation...

Grating Nanomeasurement and Implementation Technology Based on TMS320F28335

Abstract:

A grating nanomeasurement device based on TMS320F28335 was presented, a novel subdivision algorithm for nanomeasurement was put forward and implemented in TMS320F28335. The analysis and test show that, through the pre-amplifying circuit well designed and through the data process algorithm optimized, the device applied with 20m pitch grating can realize 2nm resolution and greater than 200mm/s measurement speed. The experimental results of nanopositioning also demonstrate that the grating nanomeasurement device developed by the paper can be taken as nanomeasurement equipment used in nano-CMM and nanopositioning system.