Grating Nanomeasurement and Implementation Technology Based on TMS320F28335

Abstract:

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A grating nanomeasurement device based on TMS320F28335 was presented, a novel subdivision algorithm for nanomeasurement was put forward and implemented in TMS320F28335. The analysis and test show that, through the pre-amplifying circuit well designed and through the data process algorithm optimized, the device applied with 20m pitch grating can realize 2nm resolution and greater than 200mm/s measurement speed. The experimental results of nanopositioning also demonstrate that the grating nanomeasurement device developed by the paper can be taken as nanomeasurement equipment used in nano-CMM and nanopositioning system.

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Periodical:

Edited by:

Ran Chen

Pages:

1168-1172

DOI:

10.4028/www.scientific.net/AMM.44-47.1168

Citation:

C. Y. Xu "Grating Nanomeasurement and Implementation Technology Based on TMS320F28335", Applied Mechanics and Materials, Vols. 44-47, pp. 1168-1172, 2011

Online since:

December 2010

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$35.00

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