3-D Mechanical Analysis of Magnetic- Pneumatic Microfabrication Stage

Xue Peng Liu; Dong Mei Zhao

doi:10.4028/www.scientific.net/AMM.44-47.186

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 44-473-D Mechanical Analysis of Magnetic- Pneumatic...

3-D Mechanical Analysis of Magnetic- Pneumatic Microfabrication Stage

Abstract:

3-D mechanics of magnetic- Pneumatic microfabrication stage includes X, Y-direction horizontal force and vertical direction force. Horizontal force can be resolved by analytical method with magnetic equation while vertical force can be done by isentropic equations.The acceleration is expected to be 8m/s2, and working gap of air bearing is to be 10 um. Experiments show that magnetic flux air gap is below 3.9mm with the current of 2A and working gap of air bearing is 20um with the supporting force of 16kgf to match the dynamic characteristic requirements.

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Periodical:

Applied Mechanics and Materials (Volumes 44-47)

Pages:

186-189

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.44-47.186

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Online since:

December 2010

Authors:

Xue Peng Liu, Dong Mei Zhao

Keywords:

3-D Mechanic, Isentropic Equation, Magnetic Flux Air Gap, Magnetic- Pneumatic Microfabrication Stage, Working Gap of Air Bearing

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