Design and Modeling of a CMOS MEMS Gravimetric Sensor

Abstract:

Design and modeling of a CMOS MEMS device using 0.35 µm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500.

• Periodical: Applied Mechanics and Materials (Volumes 446-447)
• Pages: 1073-1077
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.446-447.1073
• Online since: November 2013
• Authors: Mawahib Gafare Abdalrahman, John Ojur Dennis, Mohd Haris Md Khir
• Keywords: Beam’s Length, CMOS MEMS Resonators, Electrostatic Actuation, Resonance Frequency

References

[1] Andreas Hierlemann and Henry Baltes, CMOS-based chemical microsensors, The Analyst, 128, (2003), 15-28.

DOI: 10.1039/b208563c

[2] Wan-Chun Chuang, Hsin-Li Lee, Pei-Zen Chang, and Yuh-Chung Hu Review on the Modelling of Electrostatic MEMS, Sensors, 10, (2010), 6149-6171.

DOI: 10.3390/s100606149

[3] Nadim I. Maluf, Dale A. Gee, Kurt E. Petersen, and Gregory T. A. Kovacs, Medical applications of MEMS", published in WESCON/, 95. Conference record. Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies, (1995).

DOI: 10.1109/wescon.1995.485295

[4] Rupa Patel, Rongnong Zhou, Kristofer Zinszer, and Fabien Josse, Real-Time Detection of Organic Compounds in Liquid Environments Using Polymer-Coated Thickness Shear Mode Quartz Resonators, Anal. Chem., 72, (2000), 4888- 4898.

DOI: 10.1021/ac0003955

[5] C.K. Ho, E.R. Lindgren, K.S. Rawlinson, L.K. McGrath and J.L. Wright, Development of a Surface Acoustic Wave Sensor for In-Situ monitoring of Volatile Organic Compounds, Sensors, 3, (2003), 236-247.

DOI: 10.3390/s30700236

[6] Sarah S. Bedair, and Gary K. Fedder, Polymer Mass Loading of CMOS/MEMS Microslot Cantilever for Gravimetric Sensing, IEEE Sens. J., (2007), 1164- 1167.

DOI: 10.1109/icsens.2007.4388614

[7] Andreas Hierlemann, and Henry Baltes, CMOS-based chemical microsensors, Analyst, 128, (2003), 15- 28.

DOI: 10.1039/b208563c

[8] A. Singh and M. Mukherjee, Swelling Dynamics of Utrathin Polymer Films, Macromolecules, 36, (2003), 8728- 8731.

DOI: 10.1021/ma034583j

[9] W. Wai Ch, A. A. Azid, and B. Y. Majlis, Formulation of stiffness constant and effective mass for a folded beam, Arch. Mech., 62 (5), (2010), 405– 418.

[10] Chang Liu, Foundations of MEMS, Pearson Education, Inc., (2006).

[11] Julien Arcamone, Gemma Rius, Gabriel Abadal, Jordi Teva, Nuria Barniol, Francesc Perez-Murano, Micro/nanomechanical resonators for distributed mass sensing with capacitive detection, Microelectron. Eng., 83, (2006), 1216– 1220.

DOI: 10.1016/j.mee.2006.01.177

[12] Karolyn M. Hansen, Thomas Thundat, Microcantilever biosensors, Methods, 37, (2005), 57– 64.

[13] M. Paz, Structural Dynamics: Theory and Computation, CBS, New Delhi, (1987).