Investigation of Optical Properties of Aluminium Doped Zinc Oxide Thin Films Deposited by Magnetron Sputtering

Abstract:

Aluminium doped zinc oxide (AZO) thin films were prepared by magnetron-sputtering. The optical and structural properties of the films were investigated by optical transmission spectra and X-ray diffraction (XRD) measurements, respectively. The results indicate that the AZO films have hexagonal wurtzite structure with highly c-axis preferred orientation. The optical and structural properties of the films are observed to be subjected to the argon pressure. The AZO film prepared at the argon pressure of 0.5 Pa exhibits the largest crystallite size and the highest average visible transmittance. Also, the refractive index and optical energy-gap of the films were determined by optical characterization methods. The dispersion behavior of the refractive index was studied using the Sellmeier’s dispersion model.

• Periodical: Applied Mechanics and Materials (Volumes 446-447)
• Pages: 259-262
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.446-447.259
• Online since: November 2013
• Authors: J.H. Gu, T. Zhang, Z.Y. Zhong, C.Y. Yang, J. Hou
• Keywords: Aluminium Doped Zinc Oxide, Magnetron Sputtering, Optical Property, Thin Film

References

[1] C.W. Tang: Appl. Phys. Lett. Vol. 48 (1986), p.183.

[2] X. Li and D. Tang: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.9.

[3] J. Bernede, Y. Berredjem, L. Cattin and M. Morsli: Appl. Phys. Lett. Vol. 92 (2008), p.083304.

[4] X. Li and Y. Hu: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 29 (2010), p.6.

[5] M. Berggren and O. Inganäs: Science Vol. 267 (1995), p.1479.

[6] Z. Zhong: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.73.

[7] J.H. Burroughes, D.D.C. Bradley and A.R. Brown: Nature Vol. 347 (1990), p.539.

[8] S. Chen, S. Wei and X. He: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.43.

[9] X. He and L. Xiong: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 30 (2011), p.70.

[10] Z.Y. Zhong and T. Zhang: Mater. Lett. Vol. 96 (2013), p.237.

[11] Z. Zhong, J. Gu and X. He: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.33.

[12] T. Minami, H. Sato and S. Takata: Jpn. J. Appl. Phys. Vol. 31 (1992), p. L1106.

[13] F. Sun and S. Hui: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.10.

[14] Y.S. Kim and W.P. Tai: Appl. Surf. Sci. Vol. 253 (2007), p.4911.

[15] M. Krunks and E. Mellikov: Thin Solid Films Vol. 270 (1995), p.33.

[16] J. Mass, P. Bhattacharya and R.S. Katiyar: Mater. Sci. Eng. B Vol. 103 (2003), p.9.

[17] Z. Zhong and T. Zhang: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 31 (2012), p.66.

[18] M. Mulato, I. Chambouleyron and E.G. Birgin: Appl. Phys. Lett. Vol. 77 (2000), p.2133.

[19] D. Chen, Q. Li and J. Huang: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 29 (2010), p.14.

[20] J. Zhou and Z.Y. Zhong: Cryst. Res. Technol. Vol. 47 (2012), p.944.

[21] Z. Zhong, J. Zhou and L. Yang: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 30 (2011), p.34.

[22] J.F. Chang and M.H. Hon: Thin Solid Films Vol. 386 (2001), p.79.

[23] J. Gu, Z. Zhong and X. He: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 28 (2009), p.30.

[24] Z.Z. You and G.J. Hua: J. Alloy. Compd. Vol. 530 (2012), p.11.

[25] Z. Zhong, T. Zhang and H. Wang: J. South-Cent. Univ. Natl. (Nat. Sci. Ed. ) Vol. 32 (2013), p.58.

[26] Z.Z. You, G.J. Hua, Y.C. Yong and H. Jin: Cryst. Res. Technol. Vol. 47 (2012), p.1039.