Research on Fabricating of Square Aperture Spherical Micro-Lens Array through the Laser Lithography

Abstract:

Due to the practical problems nowadays that the duty cycle is small and the utility rate of solar energy is low of photoelectric sensor light sensitive array, and having analyzed the advantages on solar energy utilization of square aperture spherical micro-lens than traditional circular aperture micro-lens array, we conduct a research on the fabricating of square aperture spherical micro-lens and testing technology. With the help of light spread theory, we analyses the relationship between light amplitude distributing rules, exposure length and exposure energy, establish a mathematical model of light distributing rules and use computer software to emulate the model. The results indicate solar energy distributes regularly in adhesive film. If the energy is fixed, exposure length will gradually become saturated following time. At the same time, we fabricate infrared quartz micro-lens array with array 256×256, single element lens 40×40μm, spherical radius 60μm, single element spacing 1μm.The experiment data are the same as emulation results.

• Periodical: Applied Mechanics and Materials (Volumes 457-458)
• Pages: 323-328
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.457-458.323
• Online since: October 2013
• Authors: Yan Jun Sun, Yan Xin Yu
• Keywords: Micro-Lens, Photoelectric, Spherical, Square Aperture

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