Study on the Removal Function of Annular Polishing Pad Based on the Computer Controlled Polishing Technology

Abstract:

On the basis of the Preston assumption, the removal function of the annular polishing pad with the structure of the dual-rotor movement has been studied. The level of the similarity of the characteristic curve of the annular polishing pad and the Gaussian distribution has been evaluated by the tending factor. The pulse iteration method and the matrix calculation have been used to compute the residual error and the dwell time. The simulation result proved that the residual error (RMS) polished by the annular polishing pad had dropped 8.7% than that polished by the normal polishing pad with the same initial error condition, the surface quality has been improved by the new method.

• Periodical: Applied Mechanics and Materials (Volumes 457-458)
• Pages: 552-555
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.457-458.552
• Online since: October 2013
• Authors: Wen Biao Zhang, Shu Min Wan, Bin Lin*, Xiao Feng Zhang
• Keywords: Annular Polishing Pad, Dual-Rotor, Removal Function, Residual Error, Tending Factor

References

[1] Jones R A. Optimization of computer controlled polishing, J. Appl Opt. 16(1977)218―224.

[2] Q.D. Wang, M.C. Liu, H.X. Zhang. Removing function of polishing pad in computer controlled optical polishing. J. Optical Technology. 26(2000)32-34.

[3] H.B. Cheng, Z.J. Feng, Y.W. Wang. Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing, J. Journal of Tsinghua University(Sci&Tech). 44(2004), 1497-1500.

[4] F. Shi, Y.F. Dai, X.Q. Peng, C. Song. Dwell time algorithm based on vector for MRF process of optics, J. Journal of National University of Defense Technology. 31(2009)104-106.

[5] L.L. Luo, J.G. He, Y.J. Wang, etc. Large-scale dwell time algorithm for computer controlled optical surfacing, J. High Power Laser and Particle Beams. 23(2011)3208-3210.