Design and Fabrication of One-Chip MEMS Microphone for the Hearing Impaired

Young Hwa Lee; Young Do Jung; Jun Hyuk Kwak; Shin Hur

doi:10.4028/www.scientific.net/AMM.461.577

Paper Titles

The Study of Prediction of Agricultural Source Pollution Emissions of Ammonia Nitrogen (AN) and Chemical Oxygen Demand (COD) Based on Bionic Neural Network Algorithm
p.544

The Role of Bionic Modifications in Reducing Adhesion and Draft of Agricultural and Earthmoving Machinery
p.553

A Multi-Step Neural Control for Motor Brain-Machine Interface by Reinforcement Learning
p.565

An Equipment Used for Studying the Vestibular Perception of Gekko gecko
p.570

Design and Fabrication of One-Chip MEMS Microphone for the Hearing Impaired
p.577

Design and Realization of a Wireless Data Acquisition System Based on Multi-Nodes and Multi-Base-Stations
p.581

Design and Simulation of a PAM Based Bionic Elbow Joint
p.589

Design of the Bionic Rehabilitative Leg Based on the Passive Gait Biped
p.597

Dynamic Electromyographic Models to Assess Elbow Joint Torque
p.608

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 461Design and Fabrication of One-Chip MEMS Microphone...

Design and Fabrication of One-Chip MEMS Microphone for the Hearing Impaired

Abstract:

A good designed MEMS microphone is very important for attaining good characteristics of sensitivity and frequency bandwidth with flat response. So we performed multi-physics finite element analysis that can predict an electro-mechanical behavior of MEMS microphone. Then we fabricated the well-designed MEMS microphone with using micromachining technique. The fabricated MEMS microphone was consisted with low stress poly-silicon membrane and electroplated back-plate. The simulation of sensitivity and frequency response of packaged MEMS microphone was carried out. The simulation results show the acoustic sensitivity of -40.91 dB and the cutoff frequency of 79.4 kHz, respectively.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 461)

Pages:

577-580

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.461.577

Citation:

Cite this paper

Online since:

November 2013

Authors:

Young Hwa Lee, Young Do Jung, Jun Hyuk Kwak, Shin Hur

Keywords:

Frequency Response, Hearing Impaired, MEMS Microphone, Sensitivity, Simulation

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] P. R. Scheeper, A. G. H. Van der Donk, W. Olthuis and P. Bergveld, A review of silicon microphones, Sensors and Actuators A 44 (1994) 1-11.

DOI: 10.1016/0924-4247(94)00790-x

Google Scholar

[2] W. Kühnel and G. Hess, A silicon condenser microphone with structured back plate and silicon nitride membrane, Sensors and Actuators A 30 (1992) 251–258.

DOI: 10.1016/0924-4247(92)80128-p

Google Scholar

[3] A. Zuckerwar, Theoretical response of condenser microphones, J. Acoust. Soc. Am. 64 (1978) 1278-1285.

Google Scholar

[4] J. Park, H. Choi, Y. H. Lee and S. H, Designing a MEMS microphone using lumped element model and finite element method, Spring Conf. on Korean Soc. Mech. Eng. Micro/Nano (2010) 109-110.

Google Scholar

[5] C. W. Tan and J. Miao, Design optimization of condenser microphone: A design of experiment perspective, J. Acoust. Soc. Am. 125 (2009) 3641-3649.

DOI: 10.1121/1.3125322

Google Scholar

[6] J. Chen, L. Liu, Z. Li, Z. Tan, Y. Xu and J. Ma, On the single-chip condenser miniature microphone using DRIE and backside etching techniques, Sensors and Actuators A 103 (2003) 42-47.

DOI: 10.1016/s0924-4247(02)00326-6

Google Scholar

[7] Y. B. Ning, A. W. Mitchell and R. N. Tait, Fabrication of a silicon micromachined capacitive microphone using a dry-etch process, Sensors and Actuators A 53 (1996) 237-242.

DOI: 10.1016/0924-4247(96)01130-2

Google Scholar