Experimental Evaluation of a Small-Displacement Sensing System Based on the Surface Plasmon Resonance Technology in Heterodyne Interferometry

Abstract:

In this article, a small-displacement sensing system based on the surface plasmon resonance technology in heterodyne interferometry is proposed and evaluated. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.155nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.

• Periodical: Applied Mechanics and Materials (Volumes 479-480)
• Pages: 682-686
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.479-480.682
• Online since: December 2013
• Authors: Shinn Fwu Wang, Chi Tun Chen, Fu Hsi Kao, Yi Chu, Shyh Rong Lay, Yu Pin Liao, Liuh Chii Lin, An Li Liu
• Keywords: Attenuated Total-Internal Reflections (ATR), Heterodyne Interferometry (HI), Prism Assembly, Small Displacement, Surface Plasmon Resonance (SPR)

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