The Numerical Analysis and Simulation of Ni-Ti/Si Shape Memory Alloy Micro Valveless Pump

Abstract:

In this paper, the characteristics of shape memory alloy (SMA) valveless micro-pump and its work principles are introduced at first. Based on the flow property of diffusion and shrinkage elements, the theory analysis is developed for a valveless micropump, and the flow distribution and pressure variation curve are then achieved with Matlab. Meanwhile, the finite model of the valveless micropump is built by using the ANSYS/FLOTRAN CFD finite element software, and coupled-field simulation analysis is carried out. The effects of different geometry parameters of diffusion and shrinkage elements on the pump performance are simulated and analyzed. The results show the valveless micropump working principle is mainly based on the flow difference of diffusion and shrinkage elements and its output characteristics are related to the geometry parameters. These results are helpful to design the optimal valveless micropump.

• Periodical: Applied Mechanics and Materials (Volumes 496-500)
• Pages: 311-316
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.496-500.311
• Online since: January 2014
• Authors: De Hui Liu, Li Wen Liu*, Gang Tang, Hong Min Wen, Ming Xiang Xie, Quan Guo Lu
• Keywords: Numeric Analysis, Shape Memory Alloy (SMA), Simulation, Valveless Micro-Pump

References

[1] Ling Liu, Haibo Xie, et al. Investigation of a Valveless Micropump Actuated by Ni-Ti/Si Diaphragm[J]. Mechanical Science and Technology for Aerospace Engineering of china, 1~2(2003), in Chinese.

[2] Dong Xu, Li Wang, et al, Dynamic Actuation Behavior of Micropump Actuated by SMA Thin Film[J]. Microfabrication Technology of china, 2-6(2002), in Chinese.

[3] Yang Fang, Xiaobo Tan. A novel diaphragm micropump actuated by conjugated polymer petals: Fabrication, modeling, and experimental results, Sensors and Actuators A: Physical, 158: 121-131(2010), in Chinese.

DOI: 10.1016/j.sna.2009.12.012

[4] Cho J, Anderson M, Richards R, Bahr D, Richards C. Optimizaiton of electromechanical coupling of a thin-film PZT membrane: II. Experiment[J], Micromech. Microeng. 15: 1804-1809(2005).

DOI: 10.1088/0960-1317/15/10/003

[5] Lee S, Kim K. Design of IPMC actuator-driven valveless micropump and its flow rate estimate at low Reynolds mumbers. Smart Mater. Struct. 15(4): 1103-1109(2006).

DOI: 10.1088/0964-1726/15/4/024

[6] Cooney CG, Towe BC. A thermopneumatic dispensing micropump. Sensor and Actuator A: Physical. 116: 519-524(2004).

DOI: 10.1016/j.sna.2004.05.015

[7] Jeong OC, Yang SS. Fabrication and test of a thermopneumatic micropump with a corrugated p diaphragm. Sensor and A Acturator A, 83: 249-255(2000).

DOI: 10.1016/s0924-4247(99)00392-1

[8] MarHauf A, Nemirovsky Y, Dinnar U. A membrane micropump electrostatically actuated across the working fluid[J]. Micromech. Microeng. 15(2): 2309-2316(2005).

DOI: 10.1088/0960-1317/15/12/013

[9] Lin Q, Yang B, Xie J, Tai Y-C. Dynamic simulation of a peristaltic micropump considering coupled fluid flow and structural motion[J] . Micromech Microoeng, 17(2): 220-228(2007).

DOI: 10.1088/0960-1317/17/2/006

[10] Eiji Makino, Takashi Mitsuya, Takayuki Shibata. Fabrication of Ni-Ti shape memory micropump, 88: 256-252(2001).

[11] Dong Xu, Li Wang, Guifu Ding, et al. Characteristics and fabrication of Ni-Ti/Si diaphragm micropump, Sensors and Actuators A, 93: 87-92(2001)，in Chinese.

DOI: 10.1016/s0924-4247(01)00628-8