Optimization of Super-Long CNT Forests Growth on Conductive Substrate by Water Assisted CVD

Peng Bo Wang; De Yang Xu; Li Ning Sun

doi:10.4028/www.scientific.net/AMM.496-500.536

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 496-500Optimization of Super-Long CNT Forests Growth on...

Optimization of Super-Long CNT Forests Growth on Conductive Substrate by Water Assisted CVD

Abstract:

Water assisted chemical vapor deposition (CVD) is used widely to synthesize super long, vertically aligned, densely packed carbon nanotube (CNT) forests. Various water assisted CVD parameters give the important influence on the quality of CNT forests. In this paper, several main parameters in water assisted CVD are optimized, such as the flow rate of H₂, the content of water and growth temperature. Furthermore, growth on the conductive substrate is also studied by water assisted CVD. Under optimum condition with 10 minutes growth, the length of CNT forests could be 815 μm on silicon substrate and 369 μm on conductive substrate.

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Periodical:

Applied Mechanics and Materials (Volumes 496-500)

Pages:

536-540

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.496-500.536

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Online since:

January 2014

Authors:

Peng Bo Wang, De Yang Xu, Li Ning Sun

Keywords:

Chemical Vapor Deposition (CVD), CNT Forest, Growth, Parameter Optimization

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