The Effect of Dielectric Charging on Capacitive MEMS Switch

Qin Wen Huang; Xiang Guang Li; Yun Hui Wang; Yu Bin Jia

doi:10.4028/www.scientific.net/AMM.511-512.732

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 511-512The Effect of Dielectric Charging on Capacitive...

The Effect of Dielectric Charging on Capacitive MEMS Switch

Abstract:

Based on a one-dimensional model of dielectric charging for capacitive RF MEMS switches, the accumulated charge density and actuation voltage shift were simulated. The results illustrate that rougher surface can reduce dielectric charging, so the dielectric layer should be fabricated much rougher during deposition process. But the capacitance ratio of switch will be decreased with rougher surface, which can cause a reduction of switch performance. Thus the dielectric surface roughness should be balanced in reliability and isolation.

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Periodical:

Applied Mechanics and Materials (Volumes 511-512)

Pages:

732-736

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.511-512.732

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Online since:

February 2014

Authors:

Qin Wen Huang*, Xiang Guang Li, Yun Hui Wang, Yu Bin Jia

Keywords:

Charge Density, Dielectric Charging, One-Dimensional Model, Surface Roughness (SR)

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