Paper Titles

Influence on the Microstructure of Pinion Steel with Different Cooling Rates after Normalizing
p.12

Study on Beam-End Carrying Capacity of Waste Fiber Recycled Concrete Beam-Column Joints
p.16

The Comparison of Self-Compacting Rock-Filled Concrete with Large-Size Natural and Recycled Aggregate
p.20

Study on Properties of Al₂O₃-CaO-SiO₂-CaF₂-MgO Slag System
p.24

Helicon Plasma Discharge for Processing Wall Material
p.28

W-Doped TiO₂ Preparation and Photocatalytic Degradation of Guaiacol
p.33

The Application of PE/Thermochromic Composite Film to Sliced Fresh Pork Tenderloin
p.37

Study on the Fluidic Parameters of Supercritical CO₂
p.41

Study on the Stability of a New Propellant
p.45

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 513-517Helicon Plasma Discharge for Processing Wall...

Helicon Plasma Discharge for Processing Wall Material

Article Preview

Abstract:

A helicon wave plasma (HWP) discharge with strong magnetic field was investigated. The HWP was produced with an internal Nagoya III antenna that is perpendicular to the magnetic field and driven by a 13.56 MHz radio-frequency (RF) source. HWP was characterized in terms of electron density, electron temperature and plasma potential using a single Langmuir probe in Ar gas. The result of Langmuir probe shows that the electron density increases with RF power, but saturate above 700 W at a density of 2×10¹⁹ m^-3. Scanning electron microscopy (SEM) was extensively used to characterize the quality of the graphite surface. The result of SEM shows the surface of graphite that exposed to plasma processing has exhibited smoother and compacter surface topography. Meanwhile, the concentration of impurity on the graphite surface decreases with plasma processing.

You might also be interested in these eBooks

Applied Science, Materials Science and Information Technologies in Industry

Info:

Periodical:

Applied Mechanics and Materials (Volumes 513-517)

Pages:

28-32

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.513-517.28

Citation:

Cite this paper

Online since:

February 2014

Authors:

T.Y. Huang, C.G. Jin, M.Z. Wu, L.J. Zhuge, X.M. Wu*

Keywords:

Helicon, Internal Antenna

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2014 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] R. Toschi: Fusion Eng. Des. Vol. 36 (1997), p.1.

[2] Dittmar T et al: Phys. Scr. Vol. 2009 (2009), p.014027.

[3] Roth E et al: J. Nucl. Mater. Vol. 390–391 (2009), p.1.

[4] G. Federici et al: Nucl. Fusion. Vol. 41 (12R) (2001), p. (1967).

[5] M. Rubel et al: J. Nucl. Mater. Vol. 363–365 (2007), p.87.

[6] W. Poschenrieder, G. Staudenmaier, and P. Staib: J. Nucl. Mater. Vol. 93–94 (1980), p.322.

[7] A. Sagara et al: J. Plasma Fus. Res. Vol. 75 (1999), p.263.

[8] E. Gauthier et al: J. Nucl. Mater. Vol. 241–243 (1997), p.553.

[9] M.A. Lieberman and A.J. Lichtenberg: Principles of Plasma Discharges and Materials Processing (Wiley, New York 1994).

[10] R.W. Boswell and F.F. Chen: IEEE Trans. Plasma Sci. Vol. 25 (1997), p.1229.

[11] F.F. Chen and R.W. Boswell: IEEE Trans. Plasma Sci. Vol. 25 (1997), p.1245.

[12] A. Goncharov, I. Protsenko, G. Yushkov, and I. Brown: Appl. Phys. Lett. Vol. 75 (1999), p.911.

[13] J.J. Su, T. Katsouleas, and J.M. Dawson: Phys. Rev. A, At. Mol. Opt. Phys. Vol. 41 (1990)，p.3321.

[14] R.W. Boswell: Plasma Phys. Control. Fusion. Vol. 26(1984), p.1147.

[15] S. Shinoharaa and H. Mizokoshi: Rev. Sci. Instrum. Vol. 77 (2006), p.036108.

[16] C.G. Jin et al: IEEE Trans. Plasma Sci. Vol. 39 (2011), p.3103.

[17] F.F. Chen: Physics of Plasmas, Vol. 8 (2001), p.3029.

[18] Hiden Analytical, Ltd.: Handbook of Plasma Diagnostics (Warrington, England, U.K. 2000).

[19] F.F. Chen: Plasma Sources Science and Technology. Vol. 15 (2006), p.773.

[20] D. Herman: The Use of Electrostatic Probes to Characterize the Discharge Plasma Structure and Identify Discharge Cathode Erosion Mechanisms in Ring-Cusp Ion Thrusters (Ph.D., University of Michigan, America, 2005).