Key Technologies and Development of Micro-Nano Positioning Platform with Large Travel

Yanfei Zhang; Guang Xue Hu; Jinliang Gong; Xiu Ting Wei

doi:10.4028/www.scientific.net/AMM.55-57.929

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 55-57Key Technologies and Development of Micro-Nano...

Key Technologies and Development of Micro-Nano Positioning Platform with Large Travel

Abstract:

Depended on the continuous development of nanotechnology, many micro-nano positioning platforms have been developed. Considering the actual engineer need, technologies for design of the positioning platform with both large travel and nano scale accuracy have become an important research direction. Several large travel driving systems with nano resolution are compared, and further key technologies of large travel and ultra precision for design are also discussed. Analysis result is that there are two kinds of types of micro-nano positioning platform at present, that’s flexible hinges arranged structure and integrative mechanism of both general driving system and flexible structure. Merits and shortcomings for these two kinds of micro-nano positioning platforms are all presented and some useful conclusions are brought forward.

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Periodical:

Applied Mechanics and Materials (Volumes 55-57)

Pages:

929-932

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.55-57.929

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Online since:

May 2011

Authors:

Yanfei Zhang, Guang Xue Hu, Jinliang Gong, Xiu Ting Wei

Keywords:

Dual-Driven, Flexible Hinge, Micro-Nano Operation, Positioning Platform

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