Abrasive-Free Chemical Polishing of Hard Disk Substrate with Benzoyl Peroxide-H2O2 Slurry

Ting Jiang; Hong Lei

doi:10.4028/www.scientific.net/AMM.551.66

Paper Titles

Discussion on Calculation Method of Internal Force of Bending Beam in Mechanics of Materials
p.47

Calculation Methods of Obtain CH₃⁺ Small Fragments by the Ring of C₅H₈O⁺
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Study on Surface Roughness of Milling Based on the Elastic-Plastic Deformation
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Effect of AIBA on Abrasive-Free Polishing of Hard Disk Substrate with Peroxyacetic Acid System Slurry
p.61

Abrasive-Free Chemical Polishing of Hard Disk Substrate with Benzoyl Peroxide-H₂O₂ Slurry
p.66

Numerical Analysis of Mesostructure Damage for Composite Solid Propellant Using a Combined XFEM-Cohesive Zone Model
p.71

Deformation Analysis of the Net Surface of the Mesh Antennas under the Gravity Action
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Summarization of Terramechanics Research on Screw-Propelled Vehicle
p.84

Theoretical Stress Concentration Factor for Spatial Helix Gear
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 551Abrasive-Free Chemical Polishing of Hard Disk...

Abrasive-Free Chemical Polishing of Hard Disk Substrate with Benzoyl Peroxide-H₂O₂ Slurry

Abstract:

The effect of benzoyl peroxide (BPO) as an initiator in H₂O₂slurry for abrasive-free chemical polishing of hard disk substrate was investigated. The results of abrasive-free polishing tests show that the introduction of BPO increases material removal rate (MRR) and decreases the value of Roughness (Ra). To further investigate the mechanism of abrasive-free polishing, electron spin-resonance spectroscopy (EPR) tests, auger electron spectrometer (AES) and electrochemical tests were conducted. Electron spin-resonance spectroscopy (EPR) tests show the concentration of radicals increase and promote the reaction on the surface of hard disk substrate. Auger electron spectrometer (AES) and electrochemical tests indicate chemical changes happen on the surface of hard disk substrate, and the formed oxide film may be sparse or porous. The results imply that the introduction of BPO can effectively improve the effect of abrasive-free polishing.

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Periodical:

Applied Mechanics and Materials (Volume 551)

Pages:

66-70

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.551.66

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Online since:

May 2014

Authors:

Ting Jiang, Hong Lei*

Keywords:

Benzoyl Peroxide (BPO), Initiator, Material Removal Rate (MRR)

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