Structure Optimization of a New Micro-Hotplate Designed for Gas Sensor

Yue He; Ke Bi; Yu Li; Hai Ying Li; Xin Guo; Xiao Bo Zhang; Li Liu

doi:10.4028/www.scientific.net/AMM.574.498

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 574Structure Optimization of a New Micro-Hotplate...

Structure Optimization of a New Micro-Hotplate Designed for Gas Sensor

Abstract:

Thepaperpresents the design of a new micro-hotplate.Useplatinum filament as electrode material, Si and SiO₂assubstrate materials.Through the structure optimizing analysis, the micro-hotplate owns the best temperature distribution, when the thickness of Si, the front and rear SiO₂are set to 125, 25 and 150 μmrespectively, the width of heating electrode is 50μm and the measuring electrode is withoutinterdigital electrode. The new micro-hotplate is benefit for the improvement of sensitivity and overall performance of the sensor.

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Periodical:

Applied Mechanics and Materials (Volume 574)

Pages:

498-501

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.574.498

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Online since:

July 2014

Authors:

Yue He, Ke Bi, Yu Li, Hai Ying Li, Xin Guo, Xiao Bo Zhang, Li Liu*

Keywords:

ANSYS, Gas Sensor, Micro-Hotplate, Temperature Distribution

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* - Corresponding Author

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