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Structure Optimization of a New Micro-Hotplate Designed for Gas Sensor

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Abstract:

Thepaperpresents the design of a new micro-hotplate.Useplatinum filament as electrode material, Si and SiO2assubstrate materials.Through the structure optimizing analysis, the micro-hotplate owns the best temperature distribution, when the thickness of Si, the front and rear SiO2are set to 125, 25 and 150 μmrespectively, the width of heating electrode is 50μm and the measuring electrode is withoutinterdigital electrode. The new micro-hotplate is benefit for the improvement of sensitivity and overall performance of the sensor.

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Periodical:

Applied Mechanics and Materials (Volume 574)

Pages:

498-501

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.574.498

Citation:

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Online since:

July 2014

Authors:

Yue He, Ke Bi, Yu Li, Hai Ying Li, Xin Guo, Xiao Bo Zhang, Li Liu*

Keywords:

ANSYS, Gas Sensor, Micro-Hotplate, Temperature Distribution

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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* - Corresponding Author

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