Processing Technology of Quartz Pendulous Reed by Chemical Etching

Yun Dian Zhang; Jia Peng Wang

doi:10.4028/www.scientific.net/AMM.602-605.159

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 602-605Processing Technology of Quartz Pendulous Reed by...

Processing Technology of Quartz Pendulous Reed by Chemical Etching

Abstract:

Aiming at the material characteristics of quartz, dimensional accuracy requirements of quartz pendulous reed flexible beam and boss, this paper presents a quartz pendulous reed chemical etching processing technology. The principle of quartz chemical etching process is introduced, and a process of quartz pendulous reed chemical etching technology experiment is designed. The results of the experiment verified the effectiveness of the technology.

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Periodical:

Applied Mechanics and Materials (Volumes 602-605)

Pages:

159-162

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.602-605.159

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Online since:

August 2014

Authors:

Yun Dian Zhang*, Jia Peng Wang

Keywords:

Chemical Etching, Flexible Beam, Hydrofluoric Acid, Quartz Pendulous Reed

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* - Corresponding Author

References

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