Research on Elastic Characteristic of the Diaphragm Capsule Vacuum Packaged in Pressure Sensor

Guang Yong Zhao; Guo He; Xiao Chuan Wang

doi:10.4028/www.scientific.net/AMM.602-605.2666

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 602-605Research on Elastic Characteristic of the...

Research on Elastic Characteristic of the Diaphragm Capsule Vacuum Packaged in Pressure Sensor

Abstract:

. The diaphragm capsule, one of the most important components of the vacuum pressure sensor, should have linear elastic characteristic. Make research on simulation of the diaphragm capsule packaged in vacuum pressure sensor by finite elements Analysis to obtain its elastic characteristic, and get its elastic characteristic by experiment. Compare the displacements between simulation and experiment at each load, the maximum error is smaller than 5%. The analysis results can be used for the structure design of the diaphragm capsule.

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Periodical:

Applied Mechanics and Materials (Volumes 602-605)

Pages:

2666-2670

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.602-605.2666

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Online since:

August 2014

Authors:

Guang Yong Zhao*, Guo He, Xiao Chuan Wang

Keywords:

Diaphragm Capsule, Elastic Characteristic, Finite Element Analysis (FEA), Vacuum Pressure Sensor

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