An Analytical Model for Dynamic Pull-In of Electrostatic Perforated Plate Actuators

Yu Ming Fang; Jia Jia Yu; Wen Wen Fu; De Bo Wang; Pu Li

doi:10.4028/www.scientific.net/AMM.614.160

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 614An Analytical Model for Dynamic Pull-In of...

An Analytical Model for Dynamic Pull-In of Electrostatic Perforated Plate Actuators

Abstract:

Pull-in parameters are important parameters of electrostatic actuators. This paper presents three analytical approximate models for calculating the dynamic pull-in voltage and pull-in position of a perforated plate, respectively. The effects of the fringing field are included in two models. The accuracy of the three present models is compared with ANSYS results. Simulation results show that the detailed capacitance model with fringe effect has good agreement with the FEM results.

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Periodical:

Applied Mechanics and Materials (Volume 614)

Pages:

160-163

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.614.160

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Online since:

September 2014

Authors:

Yu Ming Fang*, Jia Jia Yu, Wen Wen Fu, De Bo Wang, Pu Li

Keywords:

Dynamic, Electrostatic Actuator, Perforated Plate, Pull-In Parameters

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* - Corresponding Author

References

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