Design of a Micro-Nano Positioning Platform Based on Stick-Slip Driving

Qian Cheng Guo; Shou Bin Liu; Wei Bin Rong

doi:10.4028/www.scientific.net/AMM.618.593

Paper Titles

Design of Microcontroller Standard SPI Interface
p.563

Construction and Influence Analysis of Co-Author Network Based on Network Science
p.569

SVM-Based Credit Rating and Feature Selection
p.573

The Study on Cointegration of Macro-Economy and Bank Credit Risk
p.578

Study on the Value Management of Forestry Intangible Assets in the Era of Knowledge Economy
p.583

The Research of Enveloping Hourglass Worm Modeling Accuracy Based on CREO
p.588

Design of a Micro-Nano Positioning Platform Based on Stick-Slip Driving
p.593

Compressive Properties Study and Finite Element Analysis on Duck Eggshell
p.598

Grid Material Supplier Selection Based on Entropy Weight Correction from Perspective of Low Carbon
p.603

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 618Design of a Micro-Nano Positioning Platform Based...

Design of a Micro-Nano Positioning Platform Based on Stick-Slip Driving

Abstract:

Micro-nanopositioning platform is a core component for micro-nanooperation. The static and dynamic characteristics of platform will determine its precision level. This paper presented a new 2-D micro-nanoplatform based on stick-slip driving. By using static structural module and modal analysis module of ANSYS software, the stress and natural frequency of pedestal were analyzed. The driving frequency of piezoelectric ceramic was selected far away from the natural frequency to avoid resonance. Dynamic performance of pedestal was also analyzed with ANSYS transient module. Simulation results show that the presented platform has excellent static and dynamic performance.

You might also be interested in these eBooks

Materials, Machines and Development of Technologies for Industrial Production

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 618)

Pages:

593-597

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.618.593

Citation:

Cite this paper

Online since:

August 2014

Authors:

Qian Cheng Guo, Shou Bin Liu*, Wei Bin Rong

Keywords:

Micro-Nanoplatform, SEM, Simulation, Stick-Slip

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] T. Fukuda, M. Nakajima, P. Liu, M. Ahmad, Bringing the nanolaboratory inside electron microscopes, IEEE Nanotechnology Magazine. 2 (2008) 18-31.

DOI: 10.1109/mnano.2008.925517

Google Scholar

[2] W. Rong, S. Zhang, M. Yu et al, A 3D stick-slip nanopositioner for nanomanipulation, Proc. of IEEE International Conference on Mechatronics and Automation (ICMA2011) 195-199.

DOI: 10.1109/icma.2011.5985655

Google Scholar

[3] D. W. Pohl, Dynamic piezoelectric translation devices, Rev. Sci. Instrum. 58 (1987) 54-57.

Google Scholar

[4] P. Mottard, Y. St-Amant, Analysis of flexural hinge orientation for amplified piezo-driven actuators, Smart Mater. Struct. 18 (2009) 035005.

DOI: 10.1088/0964-1726/18/3/035005

Google Scholar

[5] Q. Xu, Y. Li, Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier, Mechanism and Machine Theory. 46 (2011) 183-200.

DOI: 10.1016/j.mechmachtheory.2010.09.007

Google Scholar