Modeling and Modal Analysis on Capacitive Micromachined Ultrasound Transducers

Yan Li; Pei Yu Zhang

doi:10.4028/www.scientific.net/AMM.620.300

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 620Modeling and Modal Analysis on Capacitive...

Modeling and Modal Analysis on Capacitive Micromachined Ultrasound Transducers

Abstract:

The capacitive micromachined ultrasonic transducers with square and rectangular membranes were modeled for FEM simulation. The membrane is modeled as a thin plate clamped on all sides. Resonant frequencies and vibration modal analysis were carried out. The modes of CMUT with square and rectangular membranes are different. It can be basis for building CMUTs’ structure. Moreover, the resonant frequencies will vary with different side length and ratio of length/width of membrane.

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Periodical:

Applied Mechanics and Materials (Volume 620)

Pages:

300-303

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.620.300

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Online since:

August 2014

Authors:

Yan Li, Pei Yu Zhang*

Keywords:

Combine Capacitive Micromachined Ultrasound Transducers, MEMS, Resonant Analysis

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