Research on Vibration Effect of Ultraprecise Optical Encoder for Micro/Nano Measurement

Abstract:

Optical encoders have been used for decades as displacement measuring devices. As far as image measurement is concerned, CCD and CMOS are gradually used in metrology fields. In practice, performance of image ultraprecise optical encoders are related to environmental temperature, humidity, data processor speed, and vibration, thus measurement precision of encoders will be affected, and these factors limit their usage scale. Among these factors, the vibration is the largest effect factor. Here, a new experiment system was built to study vibration effect of measurement. Experiments indicated that the effects of vibration mainly exist in two aspects. Firstly, vibration induced deformation of glass grating, so distance of adjacent grating lines got uncertain. Secondly, random vibration affected CMOS image sharpness, and it reduced accuracy of encoding and decoding. Finally, some methods are provided to reduce the vibration of the grating encoder.

• Periodical: Applied Mechanics and Materials (Volumes 635-637)
• Pages: 746-749
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.635-637.746
• Online since: September 2014
• Authors: Han Wang, Qing Hai Wei, Xin Chen*, Xin Du Chen, Chao Long Fan, Bin Chen
• Keywords: CMOS, Encoder, Grating, Measurement

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