Application and Development of MEMS in the Field of Aerospace

Jie Xuan Wang; Xin Ming Qian

doi:10.4028/www.scientific.net/AMM.643.72

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Application and Development of MEMS in the Field of Aerospace
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 643Application and Development of MEMS in the Field...

Application and Development of MEMS in the Field of Aerospace

Abstract:

This paper briefly introduced the concept and technology of MEMS. It analyzed the applications of MEMS units、MEMS sensors in the field of aerospace. The importance and unique advantages of MEMS technology play an irreplaceable role in high-tech industries. Finally, this paper discussed the development of MEMS and provided direction for further study of MEMS technology.

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Periodical:

Applied Mechanics and Materials (Volume 643)

Pages:

72-76

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.643.72

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Online since:

September 2014

Authors:

Jie Xuan Wang, Xin Ming Qian*

Keywords:

Aerospace, MEMS, MEMS Sensor, MEMS Unit

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* - Corresponding Author

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