Research on the Main Parameters of the Turbo-Blower Axes TiN Covering Process

Abstract:

In this paper we will elaborate a statistic analysis on the main parameters which influence the tribologic depositions process of thin TiN layers. The deposition of tribologic layers will be executed on the axes of the supercharging turbines at the automobiles made of C120, the maximum allowed thickness being of 1÷1,5μm. The main stages of the TiN coating operation are washing and drying conditions which we relate to adhesion layer deposited titanium and titanium coating process, the process consists of important elements of the TiN coating (Electron heating time-Argon plasma, electron temperature, plasma heating argon for Bias voltage ramp., Bias voltage temperature ramp., temperature ion cleaning time for coating titanium pressure nitrogen nitrogen temperature) relative to the thickness of the deposited titanium. The operation of coating with a layer of TiN will be done on a DREVA 400 machine at S.C. “Rulmenti” S.A. Barlad. The statistical analysis of the parameters will be done using the Minitab 14 software.

• Periodical: Applied Mechanics and Materials (Volume 657)
• Pages: 529-533
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.657.529
• Online since: October 2014
• Authors: Constatin Rotariu*, Dragoș Paraschiv, Sergiu Lungu, Ovidiu Rusu, Ana Bădănac, Sorin Popa
• Keywords: Physical Method, Thin TiN Layers, Tribologic Layers, Turbo-Blower Axes

References

[1] M. Birkholz, K.E. Ehwald, D. Wolansky, I. Costina, C. Baristyran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp, F. Lisdat, Corrosion-resistant metal layers from a CMOS process for bioelectronics applications, Surface and Coatings Technology. 204 (2009).

DOI: 10.1016/j.surfcoat.2009.09.075

[2] AJA International, Inc., 2011, available at: http: /www. ajaint. com, accessed: 14. 02. (2014).

[3] N. Axen, G.A. Botton, H.Q. Lou, R.E. Somekh, I.M. Hutchings, Incorporation of nitrogen in sputtered carbon films, Surface and Coatings Technology. 81 (1996) 262.

DOI: 10.1016/0257-8972(95)02534-0

[4] J.G. Berdnoz, K.A. Müller, Possible high Tc superconductivity in the Ba-La-Cu-O system, Z. Phys. B. Condensed Matter 64 (1986) 189-193.

[5] S.R. Foltyn, High current coated conductors based on IBAD YSZ and thick YBCO/Sm-123 multilayers, Annual Peer Review of the Superconductivity Program for Electric Systems, Washington, DC, (2001).

[6] J.P. Deville, A. Cornet, Physics and engineered surfaces (in French), E.D.P. Science, (1998).

[7] L.A. Dobrzanski, D. Pakula, Tribological properties of the PVD and CVD coatings deposited on to the nitride tool ceramics, Journal of Materials Processing Technology. 175 (2006) 179-185.

DOI: 10.1016/j.jmatprotec.2005.04.032

[8] A. Billard, Low frequency Modulation of pulsed DC or RF for controlling magnetron sputtering process, Surface and Coating Technology. 86-87 (1995) 722-727.

DOI: 10.1016/s0257-8972(96)03064-2

[9] T. Elangovanb, P. Kuppusamia, R. Thirumurugesana, V. Ganesanc, E. Mohandasa, D. Mangalarajd, Nanostructured CrN thin films prepared by reactive pulsed DC magnetron sputtering, Materials Science and Engineering. B 167 (2010) 17–25.

DOI: 10.1016/j.mseb.2010.01.021