Investigation on the Gas Sensing Properties of ZnO Thin Films

Mei Yan Qiu

doi:10.4028/www.scientific.net/AMM.685.144

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 685Investigation on the Gas Sensing Properties of ZnO...

Investigation on the Gas Sensing Properties of ZnO Thin Films

Abstract:

ZnO is an important sensitive semiconductor gas material, it belongs to surface-controlled gas sensors, which has been developed as early as in the 60s. Compare to another two series of metal oxide gas sensing materials SnO₂ and Fe₂O₃_, ZnO is more stable. But its sensitivity is lower and its working temperature is higher, moreover, its selectivity isn’t good^[1]. Therefore, the improvement of ZnO gas sensitive materials mainly focuses on raising sensitivity, improving selectivity, lowering temperature and other aspects of the work.ZnO films have a certain potential market and good industrical prospect. With the rapid deep development of the research, the application of ZnO thin film technology will continue to permeate into many kinds of areas.Including production and life. At present,these methods that have been reported such as precious metals, rare earth doped oxide composite doped, surface modification have achieved good progress^[2~5].

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Periodical:

Applied Mechanics and Materials (Volume 685)

Pages:

144-148

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.685.144

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Online since:

October 2014

Authors:

Mei Yan Qiu

Keywords:

ZnO Thin Films Selectivity Sensitivity

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