Design of Differential Focusing System in Microscopic Scanning Platform

Tao Zhang; Yu Zeng Wang

doi:10.4028/www.scientific.net/AMM.685.397

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 685Design of Differential Focusing System in...

Design of Differential Focusing System in Microscopic Scanning Platform

Abstract:

Focus on the current method for microscopic small displacement, hysteresis and other shortcomings, Proposed a high motion precision, simple structure differential spiral focusing method, By stepper motor control exercise with differential screw which two identical pitch rotation, so that improved the motion accuracy.

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Periodical:

Applied Mechanics and Materials (Volume 685)

Pages:

397-400

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.685.397

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Online since:

October 2014

Authors:

Tao Zhang, Yu Zeng Wang*

Keywords:

Differential Screw, Focusing System, Microscopic Scanning

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* - Corresponding Author

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