Fabrication of PDMS Dome-Shaped Membrane and its Performance Analysis Using FEA for Fluidic Based Flow Sensor

Mohd Norzaidi Mat Nawi; Asrulnizam Abd Manaf; Mohd Rizal Arshad; Othman Sidek

doi:10.4028/www.scientific.net/AMM.699.289

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 699Fabrication of PDMS Dome-Shaped Membrane and its...

Fabrication of PDMS Dome-Shaped Membrane and its Performance Analysis Using FEA for Fluidic Based Flow Sensor

Abstract:

The dome-shaped membrane was designed for the fluidic based flow sensor for the underwater sensing. It has the diameter of 5mm and thickness within 0.2mm. The simple fabrication process for the dome shaped structure was demonstrated using casting and molding processes. The effect of the fabrication process was investigated by measuring the thickness of the dome-shaped membrane for different sample. For the performance analysis, the actual shape which was the same with the fabricated shaped was simulated and compared with the ideal shape using finite element analysis for the same input flow rate. The membrane sensitivity of the actual shape decreased from 163.4 μm/ms^-1 to 133.33 μm/ms^-1 compared to the ideal shape based on the displacement of the membrane over input fluid velocity.

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Periodical:

Applied Mechanics and Materials (Volume 699)

Pages:

289-294

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.699.289

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Online since:

November 2014

Authors:

Mohd Norzaidi Mat Nawi*, Asrulnizam Abd Manaf, Mohd Rizal Arshad, Othman Sidek

Keywords:

Dome Shaped, FEA, Flow Sensor, PDMS Fabrication

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References

[1] Y. Yang, N. Nguyen, N. Chen, M. Lockwood, C. Tucker, H. Hu, H. Bleckmann, C. Liu & D. Jones, Artificial lateral line with biomimetic neuromasts to emulate fish sensing, Bioinspiration & biomimetics 5 (2010) 1-9.

DOI: 10.1088/1748-3182/5/1/016001

Google Scholar

[2] J. Engelmann, W. Hanke, H. Bleckmann, Lateral line reception in still and running water, Journal of Comparative Physiology A 188 (2002) 513-526.

Google Scholar

[3] G. H Feng, E. S Kim, Piezoelectrically actuated dome-shaped diaphragm micropump., Journal of Microelectromechanical Systems 14 (2005) 192-199.

DOI: 10.1109/jmems.2004.839331

Google Scholar

[4] G. Kwon, F. Arai, T. Fukuda, K. Itoigawa, Y. Thukahara, Dome shaped touch sensor using PZT thin film made by hydrothermal method, Proceedings in IEEE International Conference on Robotics and Automation, 2001 (ICRA), 577-582.

DOI: 10.1109/robot.2001.932612

Google Scholar

[5] J. Oh, G. Kim, F. Kralick, H. Noh, Design and Fabrication of a PDMS/Parylene Microvalve for the Treatment of Hydrocephalus, Journal of Microelectromechanical Systems 20 (2011) 811-818.

DOI: 10.1109/jmems.2011.2148158

Google Scholar

[6] M.N.M. Nawi, A.A. Manaf, M.R. Arshad, O. Sidek, Modeling of Novel Microfluidic based flow sensor inspired from fish canal neuromast, Jurnal Teknologi (Science and Engineering) 62 (2013) 33-38.

DOI: 10.11113/jt.v62.1316

Google Scholar

[7] P. Svasek, E. Svasek, B. Lendl, M. Vellekoop, Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding, Sensors and Actuators A: Physical 115 (2004) 591-599.

DOI: 10.1016/j.sna.2004.03.055

Google Scholar