Hexangular In-Phase Coherently Coupled Arrays of Vertical Cavity Surface-Emitting Lasers Based on Proton Implantation

Abstract:

Hexangular in-phase coherently coupled arrays of vertical cavity surface-emitting lasers (VCSELs) were fabricated using proton implantation. The arrays show excellent beam quality with far-field divergence of 4.8° and the output power of 3mW under continuous-wave condition. Different global flower-shaped patterns appeared with the varied injection currents.

• Periodical: Applied Mechanics and Materials (Volume 743)
• Pages: 796-799
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.743.796
• Online since: March 2015
• Authors: J. Wang, C. Xu*, M. Xun, J. Liu
• Keywords: Coherently Coupled, Hexangular, In-Phase, VCSEL Arrays

References

[1] Yoo, H.J., Hayes, J.R., Paek, E.G., Harbison, J.P., Florez, L.T., and Kwon, Y. S, Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers, Electron. Lett., 1990, 26, (23), p.1944–(1946).

DOI: 10.1049/el:19901258

[2] Hadley, G. R, Modes of a two-dimensional phase-locked array of vertical-cavity surface-emitting lasers, Opt. Lett., 1990, 15, (21), p.1215–1217.

DOI: 10.1364/ol.15.001215

[3] Botez, D., Mawst, L., Hayashida, P., Peterson, G., and Roth, T. J, High-power diffraction-limited-beam operation from phase-locked diode-laser arrays of closely spaced leaky, waveguides (antiguides), Appl. Phys. Lett., 1988, 53, (6), p.464.

DOI: 10.1063/1.99885

[4] Siriani, D.F., and Choquette, K. D, Electronically controlled two dimensional steering of in-phase coherently coupled vertical-cavity laser arrays, IEEE Photonics Technol. Lett., 2011, 23, (3), p.167–169.

DOI: 10.1109/lpt.2010.2096207

[5] Harris, J.S., Sullivan, T.O., Sarmiento, T., Lee, M.M., and Vo, S, Emerging applications for vertical cavity surface emitting lasers, Semicond. Sci. Technol., 2011, 26, (1), p.14010.

DOI: 10.1088/0268-1242/26/1/014010

[6] Yoo, H.J., Scherer, A., Harbison, J.P., Florez, L.T., Paek, E.G., Van der Gaag, B.P., Hayes, J.R., Von Lehmen, A., Kapon, E., and Young-Se, K, Fabrication of a two-dimensional phased array of vertical-cavity surface-emitting lasers, Appl. Phys. Lett., 1990, 56, (13), p.1198.

DOI: 10.1063/1.102558

[7] Siriani, D.F., and Choquette, K. D, In-phase, coherent photonic crystal vertical-cavity surface-emitting laser arrays with low divergence, Electron. Lett., 2010, 46, (10), p.712–713.

DOI: 10.1049/el.2010.0754

[8] Lehman, A.C., and Choquette, K. D, One- and two-dimensional coherently coupled implant defined vertical cavity laser arrays, IEEE Photonics Technol. Lett., 2007, 19, (19), p.1421–1423.

DOI: 10.1109/lpt.2007.903503

[9] Meng Xun, Chen Xu, Yiyang Xie, Yanxu Zhu , Mingming Mao, Ku n Xu , J un Wang, Jie Liu and Hongda Chen, High-power in-phase coherently coupled VCSEL array based on proton implantation, ELECTRONICS LETTERS 17th July 2014 Vol. 50 No. 15 p.1085–1086.

DOI: 10.1049/el.2014.1298

[10] Mao, M.M., Xu, C., Xie, Y.Y., Kan, Q., Xun, M., Xu, K., Wang, J., Ren, H.Q., and Chen, H. D, Implant defined 3 × 3 in phase coherently coupled vertical cavity surface emitting lasers array, Photonics J., 2013, 5, (6), p.1502606.

DOI: 10.1109/jphot.2013.2292351

[11] Danner, A., Lee, J., Raftery, J., Yokouchi, N., and Choquette, K. D, Coupled-defect photonic crystal vertical cavity surface emitting lasers, Electron. Lett., 2003, 39, (18), p.1323 –1324.

DOI: 10.1049/el:20030866