Performance Analysis of Varied Dimensions Piezoelectric Energy Harvester

Abstract:

Thin film piezoelectric material plays a vital role in micro-electromechanical systems (MEMS), due to its low power requirements and the availability of high energy harvesting. Zinc oxide is selected for piezoelectric material because of its high piezoelectric coupling coefficient, easy to deposit on silicon substrate and excellent adhesion. Deposited ZnO and Al improve the electrical properties, electrical conductivity and thermal stability. The design, fabrication and experimental test of fabricated MEMS piezoelectric cantilever beams operating in d33 mode were presented in this paper. PVD (Physical Vapor Deposition) was selected as the deposition method for aluminium while spincoating was chosen to deposit ZnO thin film. The piezoelectric cantilever beam is arranged with self-developed experimental setup consisting of DC motor and oscilloscope. Based on experimental result, the longer length of piezoelectric cantilever beam produce higher output voltage at oscilloscope. The piezoelectric cantilevers generated output voltages which were from 2.2 mV to 8.8 mV at 50 Hz operation frequency. One of four samples achieved in range of desired output voltage, 1-3 mV and the rest samples produced a higher output voltage. The output voltage is adequate for a very low power wireless sensing nodes as a substitute energy source to classic batteries.

• Periodical: Applied Mechanics and Materials (Volumes 754-755)
• Pages: 481-488
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.754-755.481
• Online since: April 2015
• Authors: Bibi Nadia Taib, Norhayati Sabani, Chan Buan Fei, Mazlee Mazalan, Mohd Azarulsani Md Azidin
• Keywords: MEMS Piezoelectric Cantilever Beam, Self-Developed Experimental Setup, Spincoating, ZnO Thin Film

References

[1] Jong Cheol P, Jae Yeong P et al (2010) Modeling and characterization of piezoelectric d33-mode MEMS energy harvester microelectromechanical systems. J Microelectromech Syst 19(5): 1215–1222.

DOI: 10.1109/jmems.2010.2067431

[2] Raegan Lynn Johnson (2005) Characterization of piezoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers, Iowa State University.

DOI: 10.2172/850081

[3] Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh, Raihan Othman Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters.

DOI: 10.1007/s00542-012-1550-9

[4] Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh (2010) Theoretical Modeling and Simulation of MEMS Piezoelectric Energy Harvester, International Conference on Computer and Communication Engineering (ICCCE 2010), 11-13 May (2010).

DOI: 10.1109/iccce.2010.5556815

[5] Tao Xu, Guoying Wu, Guohing Zhang, Yilong Hao (2002) The compatibility of ZnO piezoelectric film with micromachining process, University of California, Irvine, CA 92697, USA.

[6] Khor, K. N., M. M. Shahimin, and F. R. M. Adikan. Direct optimization of Y-branch silicon nitride optical waveguide for evanescent field biosensor., Photonics (ICP), 2013 IEEE 4th International Conference on. IEEE, (2013).

DOI: 10.1109/icp.2013.6687081

[7] Khar, K. N., M. M. Shahimin, and F. R. M. Adikan. Evanescent field maximization of linear silicon nitride channel waveguide., Photonics (ICP), 2013 IEEE 4th International Conference on. IEEE, (2013).

DOI: 10.1109/icp.2013.6687112

[8] Shahimin, Mukhzeer Mohamad, Ang Keng Chuan, and Khor Kang Nan. Low Loss Optimization of Strip Channel Polysilicon Waveguide Fabrication., Advances in Environmental Biology 7 (SPEC. ISSUE 12), (2013): 3591-3595.

[9] Shukur, A. F. M., et al. Performance characteristics of valveless and cantilever-valve micropump., SPIE Micro+ Nano Materials, Devices, and Applications. International Society for Optics and Photonics, (2013).

DOI: 10.1117/12.2033519

[10] Choi WJ, Jeon Y, Jeong J-H, Sood R, Kim SG (2006) Energy harvesting MEMS device based on thin film piezoelectric cantilevers. Electroceramics 17: 2–4.

DOI: 10.1007/s10832-006-6287-3

[11] Shahimin, Mizhanim M., and Mukhzeer M. Shahimin. Eye trackers in an oculary clinical setting., SPIE Micro+ Nano Materials, Devices, and Applications. International Society for Optics and Photonics, (2013).

DOI: 10.1117/12.2033518

[12] Nikhil Gokhale (2008) Piezoelectric Zinc Oxide Thin Film for MEMS Application: A Comparative Study, 3rd International Conference on Sensing Technology, Nov. 30 – Dec. 3, (2008).

DOI: 10.1109/icsenst.2008.4757165

[13] Gokhale N, Parmar M, Rajanna K (2008) Piezoelectric zinc oxide thin film for MEMS application: a comparative study. 3rd international conference on sensing technology, 30 Nov–3 Dec 2008, Tainan.

DOI: 10.1109/icsenst.2008.4757165

[14] Murad, S. A. Z., et al. A design of 5. 2 GHz CMOS up-conversion mixer with IF input active balun., Wireless Technology and Applications (ISWTA), 2011 IEEE Symposium on. IEEE, (2011).

DOI: 10.1109/iswta.2011.6089539

[15] Murad, S. A. Z., et al. High efficiency CMOS Class E power amplifier using 0. 13 µm technology., Wireless Technology and Applications (ISWTA), 2012 IEEE Symposium on. IEEE, (2012).

DOI: 10.1109/iswta.2012.6373883

[16] Azizan, S., M. Mohamad Shahimin, and SA Zainol Murad. Simple distributed Brillouin scattering modeling for temperature and strain sensing., Business, Engineering and Industrial Applications (ISBEIA), 2012 IEEE Symposium on. IEEE, (2012).

DOI: 10.1109/isbeia.2012.6422927

[17] Reshak, A. H., et al. Electrical behaviour of MEH-PPV based diode and transistor., Progress in biophysics and molecular biology 113. 2 (2013): 289-294.

DOI: 10.1016/j.pbiomolbio.2013.09.002

[18] Rodzi, N. H. M., et al. Hydrophobicity studies of polymer thin films with varied CNT concentration., SPIE Micro+ Nano Materials, Devices, and Applications. International Society for Optics and Photonics, (2013).

DOI: 10.1117/12.2034283

[19] Shahimin, M. Mohamad, et al. Optical propulsion of mammalian eukaryotic cells on an integrated channel waveguide., SPIE MOEMS-MEMS. International Society for Optics and Photonics, (2011).

[20] Shahimin, M. Mohamad, et al. Stochastic Motion of Teratocarcinoma Cells on PEG Functionalised Surfaces., Physics Procedia 22 (2011): 498-504.

DOI: 10.1016/j.phpro.2011.11.077

[21] Nan, Khor Kang, M. M. Shahimin, and F. R. M. Adikan. Optimization of Silicon Nitride Y-Branch Optical Waveguide for Evanescent Field Biosensor., Advanced Materials Research 875 (2014): 1183-1188.

DOI: 10.4028/www.scientific.net/amr.875-877.1183

[22] Nan, Khor Kang, and M. Mohamad Shahimin. Optimisation of ion-exchanged channel waveguides for optical manipulation., Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on. IEEE, (2011).

DOI: 10.1109/rsm.2011.6088366

[23] Reshak, A. H., et al. Copper ion-exchanged channel waveguides optimization for optical trapping., Progress in biophysics and molecular biology 112. 3 (2013): 118-123.

DOI: 10.1016/j.pbiomolbio.2013.05.003

[24] Reshak, A. H., M. M. Shahimin, and F. Buang. Comparative study on human and bovine AT-SC isolation methods., Progress in biophysics and molecular biology 113. 2 (2013): 295-298.

DOI: 10.1016/j.pbiomolbio.2013.09.001

[25] Buang, Fhataheya, and Mukhzeer Mohamad Shahimin. Isolation methods of human and bovine adipose tissue derived stem cells., Biomedical Engineering and Sciences (IECBES), 2010 IEEE EMBS Conference on. IEEE, (2010).

DOI: 10.1109/iecbes.2010.5742223

[26] Reshak, A. H., et al. Surface modification via wet chemical etching of single-crystalline silicon for photovoltaic application., Progress in biophysics and molecular biology 113. 2 (2013): 327-332.

DOI: 10.1016/j.pbiomolbio.2013.10.002

[27] Suhaimi, Suriati, et al. Comparative Study of Natural Anthocyanins Compound as Photovoltaic Sensitizer., Advances in Environmental Biology 7 (SPEC. ISSUE 12), (2013): 3617-3620.

[28] Hamid HBA (2009) Fabrication, structural and electrical characteristics of zinc oxide (ZnO) thin films by direct current sputtering. Dissertation, University Sains Malaysia.

[29] Hyunuk K, Bedekar V, Islam RA, Lee WH, Leo D, Priya S(2008) Laser machined piezoelectric cantilevers for mechanical energy harvesting. IEEE Trans Ultrason Ferroelectr Freq Control 55(9): 1900–(1905).

DOI: 10.1109/tuffc.881

[30] Jeon YB, Sood R, Jeong JH, Kim SG (2005) MEMS power generator with transverse mode thin film PZT. Sens Actuators A Phys 122(1): 16–22.

DOI: 10.1016/j.sna.2004.12.032