A Novel Auto-Focus Measurement System for Mesh Membrane

Chin Sheng Chen; Chi Min Weng; Chih Jer Lin; Hsiao Wei Liu

doi:10.4028/www.scientific.net/AMM.764-765.1217

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 764-765A Novel Auto-Focus Measurement System for Mesh...

A Novel Auto-Focus Measurement System for Mesh Membrane

Abstract:

In this paper, we develop the auto-focus measurement system which includes the hardware and software systems. The hardware system is composed of both modules of the motion stage and the auto-focus optic-mechanism. And the software system consists of two phases: (1) training the response surface model (RSM) for auto-focus technology in offline phase and (2) automatically capturing mesh images by RSM and robustly measuring holes by the area-based diameter (ABD) and average diameter (AD) in online phase. The experiments presented that the proposed auto-focus technology using RSM can effectively obtain the correct focusing position. The accuracy of the diameter on a hole can reach up at most 0.891 μm using the above two algorithms. The successful measure rate is almost 98 %; the measure time is averagely 4.8 seconds per mesh. The above results revealed that the proposed system is not only robust for the auto-focus technology but also efficient and effective for the mesh membrane measurement.

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Periodical:

Applied Mechanics and Materials (Volumes 764-765)

Pages:

1217-1221

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.764-765.1217

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Online since:

May 2015

Authors:

Chin Sheng Chen*, Chi Min Weng, Chih Jer Lin, Hsiao Wei Liu

Keywords:

Auto-Focus Technology, Mesh Membrane, Response Surface Model (RSM)

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* - Corresponding Author

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