The Study on Surface Chemistry of Nanoporous Black Si Layers
We reported our detailed investigation of the microstructure and surface chemistry of nanoporous black Si layers using transmission electron microscopy techniques such as HRTEM, EDS, and EELS. We found that a one-step nanoparticle-catalyzed liquid etch creates deep conical nanovoids. The cones provide the density-graded surface that suppresses reflection. The surface of the as-etched nanoporous black Si is an amorphous Si suboxide (SiOx) produced by the strongly oxidizing nanocatalyzed etch. The c-Si/suboxide interface is rough at the nanometer scale and contains a high density of point defects.
Yiyi Zhouzhou and Qi Luo
W. Li "The Study on Surface Chemistry of Nanoporous Black Si Layers", Applied Mechanics and Materials, Vol. 79, pp. 304-308, 2011