The Study on Surface Chemistry of Nanoporous Black Si Layers

Abstract:

We reported our detailed investigation of the microstructure and surface chemistry of nanoporous black Si layers using transmission electron microscopy techniques such as HRTEM, EDS, and EELS. We found that a one-step nanoparticle-catalyzed liquid etch creates deep conical nanovoids. The cones provide the density-graded surface that suppresses reflection. The surface of the as-etched nanoporous black Si is an amorphous Si suboxide (SiOx) produced by the strongly oxidizing nanocatalyzed etch. The c-Si/suboxide interface is rough at the nanometer scale and contains a high density of point defects.

• Periodical: Applied Mechanics and Materials (Volume 79)
• Pages: 304-308
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.79.304
• Online since: July 2011
• Authors: Wang Li
• Keywords: Black Si Layer, Nanoporous, Surface Chemistry

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