The Study on Surface Chemistry of Nanoporous Black Si Layers

Abstract:

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We reported our detailed investigation of the microstructure and surface chemistry of nanoporous black Si layers using transmission electron microscopy techniques such as HRTEM, EDS, and EELS. We found that a one-step nanoparticle-catalyzed liquid etch creates deep conical nanovoids. The cones provide the density-graded surface that suppresses reflection. The surface of the as-etched nanoporous black Si is an amorphous Si suboxide (SiOx) produced by the strongly oxidizing nanocatalyzed etch. The c-Si/suboxide interface is rough at the nanometer scale and contains a high density of point defects.

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Periodical:

Edited by:

Yiyi Zhouzhou and Qi Luo

Pages:

304-308

DOI:

10.4028/www.scientific.net/AMM.79.304

Citation:

W. Li "The Study on Surface Chemistry of Nanoporous Black Si Layers", Applied Mechanics and Materials, Vol. 79, pp. 304-308, 2011

Online since:

July 2011

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$35.00

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