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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 1-2Model of Formation of Thin Insulating Films on...

Model of Formation of Thin Insulating Films on Silicon

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Physical Chemistry of Solid State Materials

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Periodical:

Advanced Materials Research (Volumes 1-2)

Pages:

601-608

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1-2.601

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Online since:

September 1994

Authors:

J.C. Bureau, K. Chafik, Z. Sassi, B. Balland, A. Glachant

Keywords:

Model of Formation, Monocrystalline Silicon (100)-(2x1), Thermodynamical Computations

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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