Model of Formation of Thin Insulating Films on Silicon

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Periodical:

Edited by:

M. Zahir

Pages:

601-608

DOI:

10.4028/www.scientific.net/AMR.1-2.601

Citation:

J.C. Bureau et al., "Model of Formation of Thin Insulating Films on Silicon", Advanced Materials Research, Vols. 1-2, pp. 601-608, 1994

Online since:

September 1994

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