Improvement of Edge Etcher System

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Abstract:

The edge etcher machine is fully automated with very dangerous chemical circumstance; the shortcoming is low capacity for production, it spends too much time on the centering process, we use vision system to reduce the time of centering process and increase the capacity of production.

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Periodical:

Advanced Materials Research (Volumes 1008-1009)

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1144-1147

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Online since:

August 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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[1] Lihui Jin, Guorui Wang, Xiang Li, Improvement of Japanese JAC WAFER ACID ETCHER, AMR (2012).

DOI: 10.4028/www.scientific.net/amr.531.75

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