Investigation on Properties of Magnesia Grinding Wheels Used in Silicon Wafer Grinding

Bing Jun Hao; Zhi Gang Dong; Shang Gao; Ren Ke Kang; Dong Ming Guo

doi:10.4028/www.scientific.net/AMR.1017.273

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Evaluation of Grinding Performance by Mechanical Properties of Super Abrasive Wheel - Relationship between Modulus of Rupture and Critical Grain Holding Power (2^nd Report)
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1017Investigation on Properties of Magnesia Grinding...

Investigation on Properties of Magnesia Grinding Wheels Used in Silicon Wafer Grinding

Abstract:

This paper presents the results of an experimental investigation on molar ratios of MgO/ MgCl₂ affecting the hardness of magnesia grinding wheels, which is one of the most important properties. Magnesite grinding blocks of different ratios of MgO/MgCl₂ were prepared. The surface Rockwell hardness of which was tested under the same curing conditions. By an integrated assessment of the experimental studies of hardness and component, it is recognized that the molar ratios of MgO/MgCl₂ can significantly affect the properties of magnesia grinding wheels. With the increase of MgO/MgCl₂ molar ratio, hardness of the specimens increases. Scanning electron microscopy (SEM) studies on grinding blocks of different ratios indicated that micro needle shaped crystal structure of phase 5 are mainly responsible for hardness development. Finally the optimal recipe was selected in consideration of the characteristics of the silicon mechanical chemical grinding (MCG), which was verified to be effective by the following grinding experiment.

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Periodical:

Advanced Materials Research (Volume 1017)

Pages:

273-278

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1017.273

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Online since:

September 2014

Authors:

Bing Jun Hao, Zhi Gang Dong*, Shang Gao, Ren Ke Kang, Dong Ming Guo

Keywords:

Hardness, Magnesia Grinding Wheels, MCG, Molar Ratio, Needle Shaped Crystal

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* - Corresponding Author

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