Stiffness Analysis of the Paddle in Continuous Diffusion Furnace for Solar Cells

Article Preview

Abstract:

Diffusion is a key step in solar cells production. A new continuous diffusion furnace was put forward to promote productivity. However, the paddle system of continuous diffusion furnace, not same as that of traditional ones, has two paddles to handover silicon wafers. When loading silicon wafers, the paddle produces a deformation. The deflection has a significant influence on stability and efficiency. A deflection calculation method is presented as to a specific paddle in continuous diffusion furnace. The mechanical analysis and the finite element analysis are done. The test result of deformation shows that the calculation result is close to actual situation and meets the design requirements. The calculation results are valuable references in paddle system design.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

81-84

Citation:

Online since:

October 2014

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2014 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] Li Guiqin, Lu Lixin, Jin Guojun, Wang Chenggang. Three-dimension numerical simulation of thermal and flow fields for a-Si-H thin film deposition by PECVD [J]. Taiyangneng Xuebao /Acta Energiae Solaris Sinica, 2011, 34(6): 1021-1027.

Google Scholar

[2] Lu Lixin, Li Guiqin, Jin Guojun, Sun Yi. Multi-physics Simulation of amorphous silicon thin-film deposition in Plasma Enhanced Chemical Vapor reactors[J]. Advanced Materials Research, 2011, 337: 266-269.

DOI: 10.4028/www.scientific.net/amr.337.266

Google Scholar

[3] Jin Guojun, Li Guiqin, Sun Yi, Lu Lixin, et al. Simulation of the effect of power on the properties of Si-based films deposited by PECVD[J]. Advanced Materials Research, 2012, 415-417: 1859-1862.

DOI: 10.4028/www.scientific.net/amr.415-417.1859

Google Scholar

[4] Sungen Cao, Ronghao Zheng, Le Xiao, The development present situation and trend of diffusion equipment, J. Machinery, 585(2013) 69-71.

Google Scholar

[5] Ronglian Chen, Le Xiao, Ronghao Zheng, Analysis of the diffusion effect of a new continuous diffusion furnace, C. Applied Mechanics and Materials, 291(2013) 115-118.

DOI: 10.4028/www.scientific.net/amm.291-294.115

Google Scholar

[6] Ronghao Zheng, Lixin Lu, Le Xiao, A continuous diffusion method to lower the resistance variance of silicon wafers, J. Machinery, 583(2012) 26-29.

Google Scholar