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Stiffness Analysis of the Paddle in Continuous Diffusion Furnace for Solar Cells
Abstract:
Diffusion is a key step in solar cells production. A new continuous diffusion furnace was put forward to promote productivity. However, the paddle system of continuous diffusion furnace, not same as that of traditional ones, has two paddles to handover silicon wafers. When loading silicon wafers, the paddle produces a deformation. The deflection has a significant influence on stability and efficiency. A deflection calculation method is presented as to a specific paddle in continuous diffusion furnace. The mechanical analysis and the finite element analysis are done. The test result of deformation shows that the calculation result is close to actual situation and meets the design requirements. The calculation results are valuable references in paddle system design.
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81-84
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October 2014
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© 2014 Trans Tech Publications Ltd. All Rights Reserved
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