Finite Element Analysis of 2-DOF Positioning Stage with a Gas Bearing Based on ANSYS

Xiao Long Zhang; Zhi Wei Lu; Bo Liu; Jun An Zhang

doi:10.4028/www.scientific.net/AMR.1056.149

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1056Finite Element Analysis of 2-DOF Positioning Stage...

Finite Element Analysis of 2-DOF Positioning Stage with a Gas Bearing Based on ANSYS

Abstract:

In order to reach the requirements of the newest generation of wire bonder, gas bearing positioning stage directly driven by voice coil actuators is designed.In the stage,an air decoupling mechanism is used. And the finite element analysis software ANSYS was used to analyze the static and dynamic characterizes of the stage so that the structure meets the requirement of stiffness,and at the same time,the moving parts are as light as possible. The simulated results show that the maximum deformation of work platform is in the work surface and the deformation is in request scope.,the deformation of decoupling mechanism is in the main driving rod contact, but this has a little influence on the stage.

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Periodical:

Advanced Materials Research (Volume 1056)

Pages:

149-153

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1056.149

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Online since:

October 2014

Authors:

Xiao Long Zhang*, Zhi Wei Lu, Bo Liu, Jun An Zhang

Keywords:

Dynamic Characterizes, Finite Element Analysis (FEA), Positioning Stage, Static Characterizes

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* - Corresponding Author

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