Technological Features of Obtaining of Nanostructured Coatings on TiNi Base by Magnetron Sputtering

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Abstract:

Using the methods of experimental design made ​​the choice determining factors for the calculation of modes magnetron sputtering coating SME steel 321H; received mathematical-statistical model that relates the performance criteria with the main parameters of the process. Studies on developing the technology of magnetron sputtering materials with shape memory TiNi-based study of the structure and formed surface layers showed that the recommended spraying regimes provided obtain a homogeneous quality of the surface layer with a grain size of 15 nm to 50 nm, chemical and phase composition which provides the memory effect.

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160-164

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December 2014

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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