Low Pressure Discharge Characteristics in a Large Sized Hollow Cathode

Tamara V. Koval; Ilya V. Lopatin; Bao Hung Nguen; Alexander S. Ogorodnikov

doi:10.4028/www.scientific.net/AMR.1084.196

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1084Low Pressure Discharge Characteristics in a Large...

Low Pressure Discharge Characteristics in a Large Sized Hollow Cathode

Abstract:

This work presents the experimental and theoretical research of low pressure discharge characteristics in a large sized hollow cathode using treated work pieces. The dependence of discharge voltage on gas pressure and system geometry has been obtained. It is demonstrated that the high plasma homogeneity with concentration up to 10¹²cm² and plasma temperature within the order of 1 eV is obtained. It is shown that the external discharge current enables the independent control of discharge current and its voltage.

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Periodical:

Advanced Materials Research (Volume 1084)

Pages:

196-199

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1084.196

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Online since:

January 2015

Authors:

Tamara V. Koval, Ilya V. Lopatin, Bao Hung Nguen, Alexander S. Ogorodnikov

Keywords:

Electron Beam Source, Glow-Discharge, Hollow Cathode, Low Pressure Discharge, Plasma Cathode, Plasma Concentration, Plasma Temperature

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References

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