Development of New Ion and Plasma Surface Modification Methods

Alexander Ryabchikov; Denis Sivin; Igor Stepanov

doi:10.4028/www.scientific.net/AMR.1084.221

Paper Titles

The Possibility of Quasi-Bound State Formation of η-Meson with Helium Isotopes
p.200

Coherent Radiation of Relativistic Electrons in Dielectric Fibers
p.205

Coherent Transition Radiation from Wire Metamaterials
p.213

Coherent X-Rays Generated by Relativistic Electrons in a Tungsten Monocrystal
p.217

Development of New Ion and Plasma Surface Modification Methods
p.221

Generation of Mechanical Waves in Metals under the High Power Ion Beam Irradiation
p.225

Features of Edge Effect of Coherent Synchrotron Radiation of Relativistic Electrons
p.234

Features of Valence Electron Density Distribution in Zr–H and Zr–He
p.241

Polarization Bremsstrahlung by Relativistic Electrons in Backscattering Geometry for Diagnosing Atomic Structure of Polycrystals
p.246

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1084Development of New Ion and Plasma Surface...

Development of New Ion and Plasma Surface Modification Methods

Abstract:

The review is devoted to the analysis of the present state-of-the-art and development trends of the new methods and equipment being developed in Tomsk Polytechnic University (TPU), for DC vacuum arc-based ion and plasma materials processing. The features and advantages are demonstrated for the method of high-concentration implantation with compensation of surface ion sputtering by metal plasma deposition, the method of metal plasma deposition under repetitively – pulsed ion mixing with ion beams and plasma flow formed in the «Raduga-5» source, and the method of coating deposition and ion implantation, including an application of the filtered DC metal plasma source and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10–99 %.

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Periodical:

Advanced Materials Research (Volume 1084)

Pages:

221-224

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1084.221

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Online since:

January 2015

Authors:

Alexander Ryabchikov, Denis Sivin*, Igor Stepanov

Keywords:

Metal Plasma, Negative High-Frequency Short-Pulsed Bias, Vacuum Arc

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References

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