Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering

Galina V. Arysheva; Nina M. Ivanova; Alla A. Pustovalova; Maksim E. Konischev

doi:10.4028/www.scientific.net/AMR.1085.134

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Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1085Surface Morphology of Titanium Oxide and...

Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering

Abstract:

This paper presents the results of study of the surface morphology of thin (~ 200 nm) biocompatible coatings based on titanium oxide and oxynitride deposited by reactive magnetron sputtering for vascular stents made from stainless steel. The analysis of the roughness of the coating surface was performed for describe qualitatively their topography.

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Periodical:

Advanced Materials Research (Volume 1085)

Pages:

134-138

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1085.134

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Online since:

February 2015

Authors:

Galina V. Arysheva, Nina M. Ivanova, Alla A. Pustovalova, Maksim E. Konischev

Keywords:

Bimodality, Biocompatible Coatings, Grain Size, Magnetron Sputtering, Morphology, Roughness, Titanium Oxide, Titanium Oxynitride, Topography

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