In order to combine the properties of phosphate surfactants and silicone surfactants, the polyether-modified polysiloxane phosphate (PPSP) was prepared. Firstly, the intermediate was synthesized through the hydrosilylation of hydricpolysiloxane and alkyl polyether. Then the polyether-modified polysiloxane phosphate was prepared through the phosphorylation reaction of intermediate and P2O5. The optimum condition of the phosphorylation reaction was the reaction temperature was 80°C, reaction time was 3.5h and molar ratio of -OH: P2O5 was 3.0:1.0. The molecular structure of phosphate was characterized by FTIR and 31P-NMR. The components and their capabilities were also studied. The CMC of PPSP was 0.58g/L and the surface tension related was 25.78mN/m, but the foaming power of PPSP is relatively low.