Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection
In this paper, the structure design and operating principle is introduced to micromachined gyroscope with electrostatic drive and piezoresistive detection. In the paper, the piezoresistive effect of multi-barrier nano-film is used as detection method, which achieves high piezoresistive sensitivity compared with Silicon piezoresistive device. The gyroscope structure and multi-barrier nano-film device is fabricated by using heteroepitaxy GaAs film on Si substrate which implements the process compatible. The natural frequencies of gyroscope are determined from the modal analysis.
Zhengyi Jiang, Xianghua Liu and Jinglong Bu
Y. B. Shi et al., "Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection", Advanced Materials Research, Vols. 154-155, pp. 119-123, 2011