Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection

Abstract:

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In this paper, the structure design and operating principle is introduced to micromachined gyroscope with electrostatic drive and piezoresistive detection. In the paper, the piezoresistive effect of multi-barrier nano-film is used as detection method, which achieves high piezoresistive sensitivity compared with Silicon piezoresistive device. The gyroscope structure and multi-barrier nano-film device is fabricated by using heteroepitaxy GaAs film on Si substrate which implements the process compatible. The natural frequencies of gyroscope are determined from the modal analysis.

Info:

Periodical:

Advanced Materials Research (Volumes 154-155)

Edited by:

Zhengyi Jiang, Xianghua Liu and Jinglong Bu

Pages:

119-123

DOI:

10.4028/www.scientific.net/AMR.154-155.119

Citation:

Y. B. Shi et al., "Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection", Advanced Materials Research, Vols. 154-155, pp. 119-123, 2011

Online since:

October 2010

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Price:

$35.00

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