Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection

Yun Bo Shi; Rui Rong Wang; Kang Du; Jun Liu

doi:10.4028/www.scientific.net/AMR.154-155.119

Paper Titles

Orthogonal Experiment Research on Tool Wear Characteristics in Diamond Cutting of Glass Soda-Lime
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Study on the Arc Shape in the Wire Arc Spray Process
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Basic Principle and Mathematical Model of Cutting Hypoid Gears by Generating Line Method
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Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection
p.119

First-Principles Study on Co-Doped ZnO with Oxygen Vacancy
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Parameters' Correlation Analysis Based on Gaussian Process for Injection Molding
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Study of Electro-Hydraulic Force Control System Controlled by Flow Press Servo-Valve and Nonlinear Performance Analysis
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 154-155Research on Micromachined Gyroscope with...

Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection

Abstract:

In this paper, the structure design and operating principle is introduced to micromachined gyroscope with electrostatic drive and piezoresistive detection. In the paper, the piezoresistive effect of multi-barrier nano-film is used as detection method, which achieves high piezoresistive sensitivity compared with Silicon piezoresistive device. The gyroscope structure and multi-barrier nano-film device is fabricated by using heteroepitaxy GaAs film on Si substrate which implements the process compatible. The natural frequencies of gyroscope are determined from the modal analysis.

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Periodical:

Advanced Materials Research (Volumes 154-155)

Pages:

119-123

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.154-155.119

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Online since:

October 2010

Authors:

Yun Bo Shi, Rui Rong Wang, Kang Du, Jun Liu

Keywords:

Electrostatic Drive, Fabrication Process, Meso-Piezoresistive Detection, Micromachined Gyroscope, Structure Design

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