Thermal Stability of CrAlN Coatings

Ming Zhu; Mei Shuan Li

doi:10.4028/www.scientific.net/AMR.177.249

Paper Titles

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Thermal Dehydration Kinetic Mechanism of Aluminum Sulfate Hydrates
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Preparation and Negative Thermal Expansion Property of ZrWMoO₈
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Thermal Stability of CrAlN Coatings
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Accuracy Research on the Measured Values of the Ceramic Material’s Normal Temperature Infrared Emissivity
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Preparation and Properties of Porous Barium Ferrite
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Comparative Study on Mn-Zn Ferrites by One-Step Synthesis and Conventional Two-Step Synthesis
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Preparation of Rare-Earth Permanent Magnetic Strontium Ferrite by Microwave Sintering Process
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 177Thermal Stability of CrAlN Coatings

Thermal Stability of CrAlN Coatings

Abstract:

Cr-Al-N coatings were deposited on the surface of the (111) single silicon for the aim to study the thermal stability of this kind of coating. The microstructure and composition of the coatings were identified by XRD and SEM/EDS, respectively. The changes of the microstructure of the coatings after being annealing in the hydrogen under 900-1100 °C were also studied by XRD analysis. The results showed that: the as-deposited coatings performed B1 microstructure with (111) preferred orientation; the microstructure of the Cr-Al-N coatings would transformed from CrN to Cr2N during the increasing of temperature and the transformation temperature increased with increasing aluminum content of the coating; AlN would also precipitate from the Cr-Al-N coating and the precipitation temperature decreased with increasing aluminum content of the coating.