Thermal Stability of CrAlN Coatings
Cr-Al-N coatings were deposited on the surface of the (111) single silicon for the aim to study the thermal stability of this kind of coating. The microstructure and composition of the coatings were identified by XRD and SEM/EDS, respectively. The changes of the microstructure of the coatings after being annealing in the hydrogen under 900-1100 °C were also studied by XRD analysis. The results showed that: the as-deposited coatings performed B1 microstructure with (111) preferred orientation; the microstructure of the Cr-Al-N coatings would transformed from CrN to Cr2N during the increasing of temperature and the transformation temperature increased with increasing aluminum content of the coating; AlN would also precipitate from the Cr-Al-N coating and the precipitation temperature decreased with increasing aluminum content of the coating.
Yiwang Bao, Li Tian and Jianghong Gong
M. Zhu and M. S. Li, "Thermal Stability of CrAlN Coatings", Advanced Materials Research, Vol. 177, pp. 249-252, 2011